High–low Kelvin probe force spectroscopy for measuring the interface state density

• Ryo Izumi,
• Masato Miyazaki,
• Yan Jun Li and
• Yasuhiro Sugawara

Beilstein J. Nanotechnol. 2023, 14, 175–189, doi:10.3762/bjnano.14.18

• actual semiconductor device evaluation, and there is a need to develop a method for obtaining such physical quantities. Here, we propose high–low Kelvin probe force spectroscopy (high–low KPFS), an electrostatic force spectroscopy method using high- and low-frequency AC bias voltages to measure the

• surfaces to confirm the dependence of the electrostatic force on the frequency of the AC bias voltage and obtain the interface state density. Keywords: high–low Kelvin probe force microscopy; high–low Kelvin probe force spectroscopy; interface state density; Kelvin probe force microscopy; Kelvin probe

• states within the bandgap difficult. Thus, a method for measuring the energy distribution of the interface states must be developed. Kelvin probe force spectroscopy (KPFS) or electrostatic force spectroscopy is a technique that enables energy spectroscopy of interface states in the semiconductor bandgap

Direct measurement of surface photovoltage by AC bias Kelvin probe force microscopy

• Masato Miyazaki,
• Yasuhiro Sugawara and
• Yan Jun Li

Beilstein J. Nanotechnol. 2022, 13, 712–720, doi:10.3762/bjnano.13.63

• as The typical value of δf and δV in our measurements were estimated to be 0.1 Hz and 1 mV, respectively, with T = 80 K, Q = 10,000, k = 650 N/m, A = 500 pm, f0 = 910 kHz, fm = 100 Hz, B = 10 Hz, nds = 100 fm/, = 111.25 Hz/V2, and = 1 V. The value of was calculated from Kelvin probe force

• spectroscopy (KPFS) [75][76], as shown in Figure 4. Schematics of AC-KPFM for direct SPV measurements. (a) Block diagram of AC-KPFM in FM mode. FG is a function generator. (b, c) Scheme of the AC bias nullifying method by laser power modulation with (b) sinusoidal and (c) square waveforms, which are

Measurement of electrostatic tip–sample interactions by time-domain Kelvin probe force microscopy

• Christian Ritz,
• Tino Wagner and
• Andreas Stemmer

Beilstein J. Nanotechnol. 2020, 11, 911–921, doi:10.3762/bjnano.11.76

• performed on Δftopo, where all electrostatic forces are compensated, including the static contribution . So far, recovering and fitting the Kelvin parabola is known as an open-loop technique, the so-called Kelvin probe force spectroscopy [22][23][24][25]. A real-time closed-loop technique has not been